Preparation and properties of Pb (Ta1/2Sc1/2) O3 thin films

Mei Dong Liu*, Yi Ke Zeng, Chuan Yi Deng, Sheng Lin Jiang, Yuan Xin Li, Yan Qiu Li, Shao Bo Liu

*此作品的通讯作者

科研成果: 期刊稿件文章同行评审

摘要

Pb(Sc1/2Ta1/2) O3(PST) ferroelectric thin films with ABO3 perovskite structure on Pt/Ti/SiO2/Si substrate have been prepared by improved Sol-Gel process. Pb(CH3COO)2·3H2O, Sc(CH3COO)3·xH2O and C10 H25O5Ta are used as raw materials. CH3OCH2CH2OH is used as solvent. PST thin films are excellent materials for preparing ferroelectric miniature refrigerator and uncooled pyroelectric infrared focal plane arrays. The dielectric, pyroelectric and ferroelectric properties of PST thin films were measured. The εr and tan θ of PST thin films are 570 and 0.02, respectively. The Px and EC of PST thin films are 3.8-6.0 μCcm-2 and 40-45 kV·cm-1, respectively, The pyroelectric coefficient of PST thin films are 4.0 × 10-4-20 × 10-4 Cm-2K-1.

源语言英语
页(从-至)142-144+159
期刊Yadian Yu Shengguang/Piezoelectrics and Acoustooptics
27
2
出版状态已出版 - 4月 2005
已对外发布

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