@inproceedings{85c1f02161204e5193ab03d3fc9d6987,
title = "Planar alignment sensor based on Rayleigh interference in two wavelengths",
abstract = "Precise alignment of planar optical element is common in industry or scientific research. In this paper, a planar alignment sensor based on Rayleigh interference in two wavelengths is proposed. Monochromatic probing lasers in two wavelengths point normally to the two mirror-reflection planes, and the reflective beams carrying alignment information are focused by a lens to form Rayleigh interference patterns at the focal plane. Four-quadrant detectors pick up the patterns and output angular and coplanar adjustment signals according to the rotational-symmetry and axial-symmetry of the pattern. Preliminary experiment demonstrated the feasibility of the method.",
keywords = "Alignment sensor, Coplanar mirrors, Parallelism of planes, Rayleigh interference",
author = "Yao Hu",
year = "2012",
doi = "10.1117/12.999598",
language = "English",
isbn = "9780819493125",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Optical Design and Testing V",
note = "Optical Design and Testing V ; Conference date: 05-11-2012 Through 07-11-2012",
}