摘要
This paper investigated pH measurements using ZnO based Surface Acoustic Wave Resonator (SAW). The resonant frequency of the SAW decreased as pH changed from 7 to 2 (acid region) or from 7 to 12 (alkaline region). The detection limits were 0.03 and 0.02 pH change, respectively, which were comparable to commercial pH meters. The interaction between hydronium (H3O +) or hydroxide (OH-) and ZnO was proposed to be responsible for the frequency drop. Both hydronium and hydroxide can increase the conductivity of the ZnO film, resulting in the resonant frequency decrease due to the acoustoelectric effect.
源语言 | 英语 |
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主期刊名 | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 |
页 | 1132-1135 |
页数 | 4 |
DOI | |
出版状态 | 已出版 - 2011 |
已对外发布 | 是 |
活动 | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, 中国 期限: 5 6月 2011 → 9 6月 2011 |
出版系列
姓名 | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 |
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会议
会议 | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 |
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国家/地区 | 中国 |
市 | Beijing |
时期 | 5/06/11 → 9/06/11 |
指纹
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Tang, R., Qiu, X., Zhu, J., Oiler, J., Huang, H., Wang, H., & Yu, H. (2011). PH measurements with ZvO based Surface Acoustic Wave Resonator. 在 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (页码 1132-1135). 文章 5969292 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969292