Output of MEMS piezoelectric energy harvester of double-clamped beams with differentwidth shapes

Lei Jin; Shiqiao Gao; Xiyang Zhang; Qinghe Wu

doi:10.3390/ma13102330

Output of MEMS piezoelectric energy harvester of double-clamped beams with differentwidth shapes

Lei Jin, Shiqiao Gao^*, Xiyang Zhang, Qinghe Wu

^*此作品的通讯作者

机电学院

Beijing Institute of Technology

科研成果: 期刊稿件 › 文章 › 同行评审

11 引用（Scopus）

摘要

For a microelectromechanical system (MEMS) piezoelectric energy harvester consisting of double-clamped beams, the effects of both beam shape and electrode arrangement on the voltage outputs are analyzed. For two kinds of harvester structures including millimeter-scale and micro-scale, and different shapes including rectangular, segmentally trapezoidal and concave parabolic are taken into account. Corresponding electric outputs are calculated and tested. Their results are in good agreement with each other. The experimental results validate the theoretical analysis.

源语言	英语
文章编号	2330
期刊	Materials
卷	13
期	10
DOI	https://doi.org/10.3390/ma13102330
出版状态	已出版 - 1 5月 2020

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Jin, L., Gao, S., Zhang, X., & Wu, Q. (2020). Output of MEMS piezoelectric energy harvester of double-clamped beams with differentwidth shapes. Materials, 13(10), 文章 2330. https://doi.org/10.3390/ma13102330

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abstract = "For a microelectromechanical system (MEMS) piezoelectric energy harvester consisting of double-clamped beams, the effects of both beam shape and electrode arrangement on the voltage outputs are analyzed. For two kinds of harvester structures including millimeter-scale and micro-scale, and different shapes including rectangular, segmentally trapezoidal and concave parabolic are taken into account. Corresponding electric outputs are calculated and tested. Their results are in good agreement with each other. The experimental results validate the theoretical analysis.",

keywords = "Double-clamped, Electrodes pair, MEMS structure, Piezoelectric energy harvester, Width shapes",

author = "Lei Jin and Shiqiao Gao and Xiyang Zhang and Qinghe Wu",

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AU - Jin, Lei

AU - Gao, Shiqiao

AU - Zhang, Xiyang

AU - Wu, Qinghe

PY - 2020/5/1

Y1 - 2020/5/1

N2 - For a microelectromechanical system (MEMS) piezoelectric energy harvester consisting of double-clamped beams, the effects of both beam shape and electrode arrangement on the voltage outputs are analyzed. For two kinds of harvester structures including millimeter-scale and micro-scale, and different shapes including rectangular, segmentally trapezoidal and concave parabolic are taken into account. Corresponding electric outputs are calculated and tested. Their results are in good agreement with each other. The experimental results validate the theoretical analysis.

AB - For a microelectromechanical system (MEMS) piezoelectric energy harvester consisting of double-clamped beams, the effects of both beam shape and electrode arrangement on the voltage outputs are analyzed. For two kinds of harvester structures including millimeter-scale and micro-scale, and different shapes including rectangular, segmentally trapezoidal and concave parabolic are taken into account. Corresponding electric outputs are calculated and tested. Their results are in good agreement with each other. The experimental results validate the theoretical analysis.

KW - Double-clamped

KW - Electrodes pair

KW - MEMS structure

KW - Piezoelectric energy harvester

KW - Width shapes

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JO - Materials

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ER -

Output of MEMS piezoelectric energy harvester of double-clamped beams with differentwidth shapes

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