TY - GEN
T1 - Novel touch mode capacitive pressure sensor based on SiC
AU - Li, Minghui
AU - Deng, Jiahao
AU - Gao, Shiqiao
PY - 2011
Y1 - 2011
N2 - The advantages of touch mode of operation are near linear output, large over-range pressure and robust structure. And Silicon Carbide (SiC) is a promising material for the device operating in harsh environments. In this paper, a novel touch mode pressure sensor based on SiC is presented, and the process is illustrated detailedly. Based on the calculation and Finite Element Analysis, the structure parameters of the sensor are designed detailedly.
AB - The advantages of touch mode of operation are near linear output, large over-range pressure and robust structure. And Silicon Carbide (SiC) is a promising material for the device operating in harsh environments. In this paper, a novel touch mode pressure sensor based on SiC is presented, and the process is illustrated detailedly. Based on the calculation and Finite Element Analysis, the structure parameters of the sensor are designed detailedly.
KW - PECVD SiC
KW - capacitive pressure sensor
KW - touch mode
UR - http://www.scopus.com/inward/record.url?scp=80054952041&partnerID=8YFLogxK
U2 - 10.1109/ICEMI.2011.6037743
DO - 10.1109/ICEMI.2011.6037743
M3 - Conference contribution
AN - SCOPUS:80054952041
SN - 9781424481590
T3 - Proceedings - IEEE 2011 10th International Conference on Electronic Measurement and Instruments, ICEMI 2011
SP - 333
EP - 335
BT - Proceedings - IEEE 2011 10th International Conference on Electronic Measurement and Instruments, ICEMI 2011
T2 - IEEE 2011 10th International Conference on Electronic Measurement and Instruments, ICEMI 2011
Y2 - 16 August 2011 through 18 August 2011
ER -