Nanoscale polymer blister formation using single femtosecond pulses

Alan T.K. Godfrey; L. N.Deepak Kallepalli; Chunmei Zhang; P. B. Corkum

doi:10.1109/IPC47351.2020.9252402

Nanoscale polymer blister formation using single femtosecond pulses

Alan T.K. Godfrey, L. N.Deepak Kallepalli, Chunmei Zhang, P. B. Corkum

University of Ottawa

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

摘要

We fabricate micro-and nanoscale blister structures in polyimide films using tightly-focused femtosecond pulses. We model nonlinear absorption processes in both the film and the substrate. We find the volume of blisters grows linearly with the energy deposited in the polyimide film.

源语言	英语
主期刊名	2020 IEEE Photonics Conference, IPC 2020 - Proceedings
出版商	Institute of Electrical and Electronics Engineers Inc.
ISBN（电子版）	9781728158914
DOI	https://doi.org/10.1109/IPC47351.2020.9252402
出版状态	已出版 - 9月 2020
已对外发布	是
活动	2020 IEEE Photonics Conference, IPC 2020 - Virtual, Vancouver, 加拿大期限: 28 9月 2020 → 1 10月 2020

出版系列

姓名	2020 IEEE Photonics Conference, IPC 2020 - Proceedings

会议

会议	2020 IEEE Photonics Conference, IPC 2020
国家/地区	加拿大
市	Virtual, Vancouver
时期	28/09/20 → 1/10/20

访问文件

10.1109/IPC47351.2020.9252402

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引用此

Godfrey, A. T. K., Kallepalli, L. N. D., Zhang, C., & Corkum, P. B. (2020). Nanoscale polymer blister formation using single femtosecond pulses. 在 2020 IEEE Photonics Conference, IPC 2020 - Proceedings 文章 9252402 (2020 IEEE Photonics Conference, IPC 2020 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IPC47351.2020.9252402

@inproceedings{d1ad53bbc07d405a85dc2440007c8421,

title = "Nanoscale polymer blister formation using single femtosecond pulses",

abstract = "We fabricate micro-and nanoscale blister structures in polyimide films using tightly-focused femtosecond pulses. We model nonlinear absorption processes in both the film and the substrate. We find the volume of blisters grows linearly with the energy deposited in the polyimide film.",

keywords = "Femtosecond lasers, Laser fabrication, Microfabrication, Nanofabrication, Ultrafast optics",

author = "Godfrey, {Alan T.K.} and Kallepalli, {L. N.Deepak} and Chunmei Zhang and Corkum, {P. B.}",

note = "Publisher Copyright: {\textcopyright} 2020 IEEE.; 2020 IEEE Photonics Conference, IPC 2020 ; Conference date: 28-09-2020 Through 01-10-2020",

year = "2020",

month = sep,

doi = "10.1109/IPC47351.2020.9252402",

language = "English",

series = "2020 IEEE Photonics Conference, IPC 2020 - Proceedings",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2020 IEEE Photonics Conference, IPC 2020 - Proceedings",

address = "United States",

}

Godfrey, ATK, Kallepalli, LND, Zhang, C & Corkum, PB 2020, Nanoscale polymer blister formation using single femtosecond pulses. 在 2020 IEEE Photonics Conference, IPC 2020 - Proceedings., 9252402, 2020 IEEE Photonics Conference, IPC 2020 - Proceedings, Institute of Electrical and Electronics Engineers Inc., 2020 IEEE Photonics Conference, IPC 2020, Virtual, Vancouver, 加拿大, 28/09/20. https://doi.org/10.1109/IPC47351.2020.9252402

Nanoscale polymer blister formation using single femtosecond pulses. / Godfrey, Alan T.K.; Kallepalli, L. N.Deepak; Zhang, Chunmei 等.
2020 IEEE Photonics Conference, IPC 2020 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2020. 9252402 (2020 IEEE Photonics Conference, IPC 2020 - Proceedings).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - Nanoscale polymer blister formation using single femtosecond pulses

AU - Godfrey, Alan T.K.

AU - Kallepalli, L. N.Deepak

AU - Zhang, Chunmei

AU - Corkum, P. B.

PY - 2020/9

Y1 - 2020/9

N2 - We fabricate micro-and nanoscale blister structures in polyimide films using tightly-focused femtosecond pulses. We model nonlinear absorption processes in both the film and the substrate. We find the volume of blisters grows linearly with the energy deposited in the polyimide film.

AB - We fabricate micro-and nanoscale blister structures in polyimide films using tightly-focused femtosecond pulses. We model nonlinear absorption processes in both the film and the substrate. We find the volume of blisters grows linearly with the energy deposited in the polyimide film.

KW - Femtosecond lasers

KW - Laser fabrication

KW - Microfabrication

KW - Nanofabrication

KW - Ultrafast optics

UR - http://www.scopus.com/inward/record.url?scp=85097902206&partnerID=8YFLogxK

U2 - 10.1109/IPC47351.2020.9252402

DO - 10.1109/IPC47351.2020.9252402

M3 - Conference contribution

AN - SCOPUS:85097902206

T3 - 2020 IEEE Photonics Conference, IPC 2020 - Proceedings

BT - 2020 IEEE Photonics Conference, IPC 2020 - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2020 IEEE Photonics Conference, IPC 2020

Y2 - 28 September 2020 through 1 October 2020

ER -

Nanoscale polymer blister formation using single femtosecond pulses

摘要

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