Multi-Parameter sensing in liquid using a lamb wave based microsensor

Feng Li*, Yi Hui Wu, J. F. Manceau, F. Bastien

*此作品的通讯作者

科研成果: 书/报告/会议事项章节会议稿件同行评审

3 引用 (Scopus)

摘要

The characters of zero anti-symmetric (A0) and zero symmetric modes (S0) of Lamb wave sensor loaded with liquid were investigated and compared in the paper. It was found that due to the their different acoustic penetration depths inside the liquid the changes of the surface characteristics of the sensor and the characteristics of liquid near the surface can be identified respectively by combined A0 and S0 modes simultaneously. At the same time, the mass sensitivities of both A0 mode and S0 mode of a 2μm Lamb wave sensor were demonstrated experimentally. It was proved that S0 mode has higher sensitivity to surface mass changes and the mass sensitivity of the acoustic sensor can be improved further.

源语言英语
主期刊名2008 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications, SPAWDA 2008
320-323
页数4
DOI
出版状态已出版 - 2008
已对外发布
活动2008 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications, SPAWDA 2008 - Nanjing, 中国
期限: 5 12月 20088 12月 2008

出版系列

姓名2008 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications, SPAWDA 2008

会议

会议2008 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications, SPAWDA 2008
国家/地区中国
Nanjing
时期5/12/088/12/08

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