TY - GEN
T1 - Multi-axis integrated CMOS-MEMS inertial sensors
AU - Xie, Huikai
AU - Sun, Hongzhi
AU - Jia, Kemiao
AU - Fang, Deyou
AU - Qu, Hongwei
PY - 2010
Y1 - 2010
N2 - Multi-axis integration of inertial sensors is crucial for portable electronics. This paper presents a DRIE CMOS MEMS process that is capable of realizing lateral and vertical sensing comb drives. An integrated 3-axis accelerometer and an integrated 5-axis inertial measurement unit including a 3-axis accelerometer, a z-axis gyroscope and an x/y gyroscope are also introduced.
AB - Multi-axis integration of inertial sensors is crucial for portable electronics. This paper presents a DRIE CMOS MEMS process that is capable of realizing lateral and vertical sensing comb drives. An integrated 3-axis accelerometer and an integrated 5-axis inertial measurement unit including a 3-axis accelerometer, a z-axis gyroscope and an x/y gyroscope are also introduced.
UR - http://www.scopus.com/inward/record.url?scp=78751489690&partnerID=8YFLogxK
U2 - 10.1109/ICSICT.2010.5667618
DO - 10.1109/ICSICT.2010.5667618
M3 - Conference contribution
AN - SCOPUS:78751489690
SN - 9781424457984
T3 - ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings
SP - 1394
EP - 1395
BT - ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings
T2 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology
Y2 - 1 November 2010 through 4 November 2010
ER -