TY - GEN
T1 - Morphology and Radiation Characteristics of Blue Core in Argon Helicon Plasma Discharge
AU - Yuan, Qian
AU - Han, Ruoyu
AU - Cui, Ruilin
AU - Zhu, Wanying
AU - Wang, Yueqing
AU - Yang, Bingyan
AU - Ouyang, Jiting
N1 - Publisher Copyright:
© 2021 IEEE.
PY - 2021/5/28
Y1 - 2021/5/28
N2 - Argon helicon plasma is typically associated with a blue core, namely a radially localized central area of strong ion light emission. An experimental study was carried out to study the morphology and radiation characteristics of blue core in argon helicon plasma discharge. Experiments were carried out with two technics including Local Optical Emission Spectroscopy (LOES) and time-integrated images with digital camera. In particular, the helicon mode, characterized by the intense blue core plasma, can be achieved by adjusting the input parameters such as RF power, magnetic field, and operating pressure. Analysis of a prominent characteristic line (ArII 481.0 nm) of blue core indicates that the intensity of ion line increases linearly with the RF power, magnetic field, or operating pressure in certain intervals (when 1000 W< P< 2000 W or 250 Gauss < B0 < 500 Gauss or 0.1 Pa< p< 1.0 Pa). Apart from this, blue core width increases with the power while decreases with an increase in magnetic field or operating pressure. In order to further understand the formation of the blue core, parameter regarding electron temperature is adopted to reveal that the increase of the intensity of ion line depends strongly on the increase of electron temperature.
AB - Argon helicon plasma is typically associated with a blue core, namely a radially localized central area of strong ion light emission. An experimental study was carried out to study the morphology and radiation characteristics of blue core in argon helicon plasma discharge. Experiments were carried out with two technics including Local Optical Emission Spectroscopy (LOES) and time-integrated images with digital camera. In particular, the helicon mode, characterized by the intense blue core plasma, can be achieved by adjusting the input parameters such as RF power, magnetic field, and operating pressure. Analysis of a prominent characteristic line (ArII 481.0 nm) of blue core indicates that the intensity of ion line increases linearly with the RF power, magnetic field, or operating pressure in certain intervals (when 1000 W< P< 2000 W or 250 Gauss < B0 < 500 Gauss or 0.1 Pa< p< 1.0 Pa). Apart from this, blue core width increases with the power while decreases with an increase in magnetic field or operating pressure. In order to further understand the formation of the blue core, parameter regarding electron temperature is adopted to reveal that the increase of the intensity of ion line depends strongly on the increase of electron temperature.
KW - blue core
KW - emission spectroscopy
KW - helicon mode
KW - ion light emission
UR - http://www.scopus.com/inward/record.url?scp=85114200071&partnerID=8YFLogxK
U2 - 10.1109/CIEEC50170.2021.9510781
DO - 10.1109/CIEEC50170.2021.9510781
M3 - Conference contribution
AN - SCOPUS:85114200071
T3 - Proceedings of 2021 IEEE 4th International Electrical and Energy Conference, CIEEC 2021
BT - Proceedings of 2021 IEEE 4th International Electrical and Energy Conference, CIEEC 2021
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 4th IEEE China International Electrical and Energy Conference, CIEEC 2021
Y2 - 28 May 2021 through 30 May 2021
ER -