Monolithic Integration of Carbon Nanotubes and CMOS

As discussed in the previous chapter, carbon nanotubes (CNTs) have been explored for various applications with great success. With their extraordinary and unique electrical, mechanical, and chemical properties, it is also highly desirable to develop a CMOS (complementary metal-oxide-semiconductor)-CNT hybrid integration technology that can exploit the advantages of the powerful signal conditioning and processing capability of the state-of-the-art CMOS technology. CNTs may be used either as an integral part of CMOS circuits or as sensing elements to form functional nanoelectromechical systems (NEMS).