Modular design method of desktop micro-assembly system for non-silicon MEMS

To solve the bottleneck problem of assembly of non-silicon MEMS, a modular design method of desktop micro-assembly system was proposed for non-silicon MEMS. First, the connotation, the characteristics and the application of desktop micro-assembly system were elaborated, and the principle of module partition was presented based on general function integrity of assembly unit and reconfiguration of system. Afterwards, the method of correlation analysis for the subassembly of micro-assembly system was put forward and the comprehensive correlation matrix was established through the method of correlation analysis, the correlation matrix was processed with a fuzzy clustering method, and the quantitative calculating process of module partition was ascertained. After that, the result of module partition was evaluated by fuzzy evaluation method. Finally, taking the autonomous assembly unit of desktop micro-assembly system as the sample, the validity of the modular design method was validated in the design process of a desktop micro-assembly system.