摘要
One ultra-precision pneumatic servo motion stage combined fine and coarse control is designed in this paper. Metal bellows and the voice coil motor are used as the driving element, aerostatic stage is used to support the working stage, and the control accuracy of the motion stage is improved under conditions without friction. The hardware scheme is given in this paper, and the system mathematical model is established, and the control algorithm is analyzed too.
| 源语言 | 英语 |
|---|---|
| 主期刊名 | 6th IFAC Symposium on Mechatronic Systems, MECH 2013 |
| 出版商 | IFAC Secretariat |
| 页 | 453-456 |
| 页数 | 4 |
| 版本 | 5 |
| ISBN（印刷版） | 9783902823311 |
| DOI | |
| 出版状态 | 已出版 - 2013 |
| 活动 | 6th IFAC Symposium on Mechatronic Systems, MECH 2013 - Hangzhou, 中国 期限: 10 4月 2013 → 12 4月 2013 |
出版系列
| 姓名 | IFAC Proceedings Volumes (IFAC-PapersOnline) |
|---|---|
| 编号 | 5 |
| 卷 | 46 |
| ISSN（印刷版） | 1474-6670 |
会议
| 会议 | 6th IFAC Symposium on Mechatronic Systems, MECH 2013 |
|---|---|
| 国家/地区 | 中国 |
| 市 | Hangzhou |
| 时期 | 10/04/13 → 12/04/13 |
指纹
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Tian, Y., Wang, T., & Wang, M. (2013). Modeling of ultra-precision pneumatic servo control stage. 在 6th IFAC Symposium on Mechatronic Systems, MECH 2013 (5 编辑, 页码 453-456). (IFAC Proceedings Volumes (IFAC-PapersOnline); 卷 46, 号码 5). IFAC Secretariat. https://doi.org/10.3182/20130410-3-CN-2034.00125