Miniaturized fiber optic accelerometer incorporating liquid metal as the proof mass

Chenxing Xue, Rui Zhou, Yuanjia Xia, Wei Gao, Min Li, Hongyun Gao, Xiaoyan Wen, Haifei Lu*, Guobing Chen, Desheng Chen

*此作品的通讯作者

科研成果: 期刊稿件文章同行评审

摘要

The inertial element of a solid block is commonly used as the proof mass in traditional accelerometers. However, it is challenging to accommodate both the high-density solid-state proof mass and the highly elastic component simultaneously in a miniature sensor, which makes it difficult for the sensors to maintain comparable sensing performance at a miniaturized size. Here, a novel, to the best of our knowledge, liquid metal-based fiber optic accelerometer (LMFOA) is proposed for the first time to meet this requirement. A theoretical model for the LMFOA is introduced to illustrate its feasibility and sensing mechanism. Then, a miniature LMFOA based on a gallium-indium-tin alloy and a polymer-based flexible diaphragm is demonstrated experimentally, showing excellent consistency between the simulation and experimental results. The characteristic test results indicate that the prepared LMFOA has an acceleration sensitivity of 36.6 dB re 1 rad/g below 300 Hz, with a transverse cross talk less than -35 dB. By integrating high-density, highly fluidity liquid metal with a highly flexible diaphragm, the LMFOA shows great potential for applications requiring miniaturization.

源语言英语
页(从-至)241-244
页数4
期刊Optics Letters
50
2
DOI
出版状态已出版 - 15 1月 2025

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Xue, C., Zhou, R., Xia, Y., Gao, W., Li, M., Gao, H., Wen, X., Lu, H., Chen, G., & Chen, D. (2025). Miniaturized fiber optic accelerometer incorporating liquid metal as the proof mass. Optics Letters, 50(2), 241-244. https://doi.org/10.1364/OL.536982