@inproceedings{2bd2c467178340828e61a92e5f4c5ec3,
title = "Microstructure and properties of atmospheric pressure chemical vapor deposition of tungsten carbide",
abstract = "Tungsten carbide / tungsten coating is prepared from tungsten hexafluoride (WF6), hydrogen (H2) and dimethyl ether (DME) mixtures by chemical vapor deposition (CVD) under atmospheric pressure conditions. The cross-sectional structure and the surface morphology of the coating were observed using optical microscope and scanning electron microscopy. It is found that the tungsten layer is columnar and tungsten carbide / tungsten coating is fine grain lamellar structure. The preferential growth of tungsten was proposed to be effect of DME, and the {100} preferred orientation gradually disappeared by XRD. That the pre-deposition of tungsten on the substrate can improve the coverage of the tungsten carbide coating was observed. Finally, the cross section of the micrograph was measured at 28.77 GPa with a nano-indentation.",
keywords = "coating, preferred orientation, tungsten, tungsten carbide",
author = "Huicong Zhang and Chengwena Tan and Xiaodong Yu and Honglei Ma and Huaijian Cai and Fang Wang",
note = "Publisher Copyright: {\textcopyright} 2017 Author(s).; 1st International Conference on Materials Science, Energy Technology, Power Engineering, MEP 2017 ; Conference date: 15-04-2017 Through 16-04-2017",
year = "2017",
month = may,
day = "8",
doi = "10.1063/1.4982439",
language = "English",
series = "AIP Conference Proceedings",
publisher = "American Institute of Physics Inc.",
editor = "Jun Xiao and Zhibin You and Zhihui Tan",
booktitle = "Materials Science, Energy Technology, and Power Engineering I",
address = "United States",
}