MEMS-based portable confocal Raman spectroscopy rapid imaging system

Aiming at the miniaturization and rapid imaging requirements of a portable confocal Raman system, a MEMSbased portable confocal Raman spectroscopy rapid imaging method is proposed in this study. This method combines the dual 2D MEMS mirror scanning method and the grid-by-grid scanning method. The dual 2D MEMSmirror scanning method is used for the miniaturization design of the system, and the grid-by-grid scanning method is used for rapid imaging of Raman spectroscopy. Finally, the rapid imaging and miniaturization design of a portable confocal Raman spectroscopy system are realized. Based on this method, a portable confocal Raman spectroscopy rapid imaging system with an optical probe size of just 98mm× 70mm× 40mm is constructed. The experimental results show that the imaging speed of the system is 45 times higher than that of the traditional point-scan confocal Raman system, and the imaging speed can be further improved according to the requirements. In addition, the system is used to swiftly identify agate ore, and the material composition distribution image over a 126 μm2 ×126 μm2 region is obtained in just 16 min. This method provides a new solution for the rapid imaging and miniaturization design of the confocal Raman system, as well as a new technical means for rapid detection in deep space exploration, geological exploration, and field detection.