Macro-state self-consistent Monte Carlo method

The traditional Monte Carlo method needs a large number of samples to obtain simulation results consistent with the system macro-state since the method is less focused on the system macro-state when simulating the system micro-event. This feature makes the computations very expensive, especially when simulating large spaces with numerous elements. A macro-state self-consistent Monte Carlo method is given here that can rapidly and economically simulate the system evolution at macro-scale with a macro-analysis method and obtain statistical information and the random distribution parameters of the system elements. The parameters can be defined at any time and any location on the microscopic scale to reduce the complexity of the micro-simulation while ensuring a certain degree of simulation accuracy and the amount of information. This Monte Carlo method is used to simulate the micro phenomenon of fluorine radical transiting from two different stepped profiles of showerhead holes in the plasma enhanced chemical vapor deposition (PECVD) cleaning etching process to evaluate its sticking rate on each wall and its survival rate at the outlet. The results qualitatively show that a stepped up hole design is conducive to the fluorine radical transition to the showerhead.