Laser differential reflection-confocal lens thickness measurement

Nan Zhou, Yun Wang*, Weiqian Zhao, Lirong Qiu, Lingfeng Chen

*此作品的通讯作者

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

A new laser differential reflection-confocal lens thickness measurement (DRCTM) method is proposed for the high-accuracy measurement of the lens thickness. DRCTM uses the test beam reflected from the lens first and last surface to determine the vertex positions of the two surfaces. Differential confocal technology is used to precisely identify the lens vertexes of the lens first and last surfaces, thereby enabling the precise measurement of the lens thickness. Compared with the existing measurement methods, DRCTM has high accuracy and strong anti-interference capability. Theoretical analysis and experimental results indicate that the DRCTM measurement error can be limited to 0.0015%.

源语言英语
主期刊名AOPC 2015
主期刊副标题Optical Test, Measurement, and Equipment
编辑Jonathan D. Ellis, Yongcai Guo, Sen Han, Junpeng Guo
出版商SPIE
ISBN(电子版)9781628419023
DOI
出版状态已出版 - 2015
活动Applied Optics and Photonics, China: Optical Test, Measurement, and Equipment, AOPC 2015 - Beijing, 中国
期限: 5 5月 20157 5月 2015

出版系列

姓名Proceedings of SPIE - The International Society for Optical Engineering
9677
ISSN(印刷版)0277-786X
ISSN(电子版)1996-756X

会议

会议Applied Optics and Photonics, China: Optical Test, Measurement, and Equipment, AOPC 2015
国家/地区中国
Beijing
时期5/05/157/05/15

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