Large-aperture, rapid scanning MEMS micromirrors for free-space optical communications

Lei Wu*, Huikai Xie

*此作品的通讯作者

科研成果: 书/报告/会议事项章节会议稿件同行评审

7 引用 (Scopus)

摘要

Electrothermally-actuated MEMS mirrors with large apertures of 6 mm and 10 mm are reported. Optical scan above 10°, divergence below 0.53 mrad and resonance frequencies in the order of 100 Hz have been achieved.

源语言英语
主期刊名2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
131-132
页数2
DOI
出版状态已出版 - 2009
已对外发布
活动2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 - Clearwater, FL, 美国
期限: 17 8月 200920 8月 2009

出版系列

姓名2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

会议

会议2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
国家/地区美国
Clearwater, FL
时期17/08/0920/08/09

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