Infrared absorption modeling of VOx microbolometer

Mehdi Aggoun, Jianliang Jiang, M. Khalid Khan

科研成果: 书/报告/会议事项章节会议稿件同行评审

3 引用 (Scopus)

摘要

The absorption model plays an important role in the design of the microbolometer structure regarding the determination of the optimum thickness of the structure layers. Moreover, the infrared absorption depends on the wavelength of the radiation and the material properties. In this paper, we presented an Infrared absorption model with absorption coefficient of 96% at maximum absorption wavelength of 9.89μm which is very close to the expected value 10μm. This model was established by using MATLAB so that the simulation of the infrared absorption of the VOx microbolometer could be accomplished. In order to confirm the role of this modeling in the design of the device structure, comparison with other structures is also studied in this paper.

源语言英语
主期刊名2015 International Conference on Optical Instruments and Technology
主期刊副标题Optical Sensors and Applications, OIT 2015
编辑Zhongping Chen, Xuping Zhang, David Erickson, Xudong Fan
出版商SPIE
ISBN(电子版)9781628418019
DOI
出版状态已出版 - 2015
活动2015 International Conference on Optical Instruments and Technology: Optical Sensors and Applications, OIT 2015 - Beijing, 中国
期限: 17 5月 201519 5月 2015

出版系列

姓名Proceedings of SPIE - The International Society for Optical Engineering
9620
ISSN(印刷版)0277-786X
ISSN(电子版)1996-756X

会议

会议2015 International Conference on Optical Instruments and Technology: Optical Sensors and Applications, OIT 2015
国家/地区中国
Beijing
时期17/05/1519/05/15

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