Influence of Ne⁺ bombarding energy on the properties of diamond-like carbon film by ion beam assisted deposition

Diamond-like carbon (DLC) films were prepared at different bombarding energies by ion beam assisted deposition (IBAD) at a lower deposition temperature. It was found that the film bombarded by the Ne ion beam with an energy of 200 eV possessed the highest fraction of sp³ bonding using Raman spectroscopy. The field emission behavior of the DLC film bombarded with a Ne⁺ energy of 200 eV was also investigated. An onset of emission field as low as 2.6 V/μm was obtained using a flat plate anode configuration. A high electron emission current of about 2.2 × 10^-2 mA over a 1 cm² cathode area was observed at the electric field of 5V/μm.