Improvement of thermal properties in epitaxial aluminum nitride pedestal microring

Xianwen Liu; Changzheng Sun; Bing Xiong; Zhibiao Hao; Yanjun Han; Jian Wang; Lai Wang; Yi Luo

doi:10.1109/ICOCN.2015.7203683

Improvement of thermal properties in epitaxial aluminum nitride pedestal microring

Xianwen Liu, Changzheng Sun, Bing Xiong, Zhibiao Hao, Yanjun Han, Jian Wang, Lai Wang, Yi Luo

Tsinghua University

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

2 引用（Scopus）

摘要

We report thermal properties improvement of aluminum nitride (AlN) microring resonator by adopting epitaxial material and pedestal structure. With optimized inductively coupled plasma (ICP) dry etching using Cl₂/BCl₃/Ar mixture, pedestal microring resonators have been fabricated on epitaxial AlN. Transmission measurement reveals a loaded quality factor of ∼1×10⁴ at under-coupled condition, corresponding to a propagation loss of 27 dB/cm around 1.55 μm. Thermal effect induced resonant peak shift at different coupled powers is 6.3 pm/mW, and optical bistability can be observed at an input power above ∼115 mW.

源语言	英语
主期刊名	ICOCN 2015 - 14th International Conference on Optical Communications and Networks, Proceedings
出版商	Institute of Electrical and Electronics Engineers Inc.
ISBN（电子版）	9781467373739
DOI	https://doi.org/10.1109/ICOCN.2015.7203683
出版状态	已出版 - 14 8月 2015
已对外发布	是
活动	14th International Conference on Optical Communications and Networks, ICOCN 2015 - Nanjing, 中国期限: 3 7月 2015 → 5 7月 2015

出版系列

姓名	ICOCN 2015 - 14th International Conference on Optical Communications and Networks, Proceedings

会议

会议	14th International Conference on Optical Communications and Networks, ICOCN 2015
国家/地区	中国
市	Nanjing
时期	3/07/15 → 5/07/15

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10.1109/ICOCN.2015.7203683

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Liu, X., Sun, C., Xiong, B., Hao, Z., Han, Y., Wang, J., Wang, L., & Luo, Y. (2015). Improvement of thermal properties in epitaxial aluminum nitride pedestal microring. 在 ICOCN 2015 - 14th International Conference on Optical Communications and Networks, Proceedings 文章 7203683 (ICOCN 2015 - 14th International Conference on Optical Communications and Networks, Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICOCN.2015.7203683

Liu, Xianwen ; Sun, Changzheng ; Xiong, Bing 等. / Improvement of thermal properties in epitaxial aluminum nitride pedestal microring. ICOCN 2015 - 14th International Conference on Optical Communications and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2015. (ICOCN 2015 - 14th International Conference on Optical Communications and Networks, Proceedings).

@inproceedings{f7107442b14149fea472b8c31ec8db6e,

title = "Improvement of thermal properties in epitaxial aluminum nitride pedestal microring",

abstract = "We report thermal properties improvement of aluminum nitride (AlN) microring resonator by adopting epitaxial material and pedestal structure. With optimized inductively coupled plasma (ICP) dry etching using Cl2/BCl3/Ar mixture, pedestal microring resonators have been fabricated on epitaxial AlN. Transmission measurement reveals a loaded quality factor of ∼1×104 at under-coupled condition, corresponding to a propagation loss of 27 dB/cm around 1.55 μm. Thermal effect induced resonant peak shift at different coupled powers is 6.3 pm/mW, and optical bistability can be observed at an input power above ∼115 mW.",

keywords = "Epitaxial AlN, ICP dry etching, pedestal microring, thermal properties",

author = "Xianwen Liu and Changzheng Sun and Bing Xiong and Zhibiao Hao and Yanjun Han and Jian Wang and Lai Wang and Yi Luo",

note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 14th International Conference on Optical Communications and Networks, ICOCN 2015 ; Conference date: 03-07-2015 Through 05-07-2015",

year = "2015",

month = aug,

day = "14",

doi = "10.1109/ICOCN.2015.7203683",

language = "English",

series = "ICOCN 2015 - 14th International Conference on Optical Communications and Networks, Proceedings",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "ICOCN 2015 - 14th International Conference on Optical Communications and Networks, Proceedings",

address = "United States",

}

Liu, X, Sun, C, Xiong, B, Hao, Z, Han, Y, Wang, J, Wang, L & Luo, Y 2015, Improvement of thermal properties in epitaxial aluminum nitride pedestal microring. 在 ICOCN 2015 - 14th International Conference on Optical Communications and Networks, Proceedings., 7203683, ICOCN 2015 - 14th International Conference on Optical Communications and Networks, Proceedings, Institute of Electrical and Electronics Engineers Inc., 14th International Conference on Optical Communications and Networks, ICOCN 2015, Nanjing, 中国, 3/07/15. https://doi.org/10.1109/ICOCN.2015.7203683

Improvement of thermal properties in epitaxial aluminum nitride pedestal microring. / Liu, Xianwen; Sun, Changzheng; Xiong, Bing 等.
ICOCN 2015 - 14th International Conference on Optical Communications and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2015. 7203683 (ICOCN 2015 - 14th International Conference on Optical Communications and Networks, Proceedings).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - Improvement of thermal properties in epitaxial aluminum nitride pedestal microring

AU - Liu, Xianwen

AU - Sun, Changzheng

AU - Xiong, Bing

AU - Hao, Zhibiao

AU - Han, Yanjun

AU - Wang, Jian

AU - Wang, Lai

AU - Luo, Yi

PY - 2015/8/14

Y1 - 2015/8/14

N2 - We report thermal properties improvement of aluminum nitride (AlN) microring resonator by adopting epitaxial material and pedestal structure. With optimized inductively coupled plasma (ICP) dry etching using Cl2/BCl3/Ar mixture, pedestal microring resonators have been fabricated on epitaxial AlN. Transmission measurement reveals a loaded quality factor of ∼1×104 at under-coupled condition, corresponding to a propagation loss of 27 dB/cm around 1.55 μm. Thermal effect induced resonant peak shift at different coupled powers is 6.3 pm/mW, and optical bistability can be observed at an input power above ∼115 mW.

AB - We report thermal properties improvement of aluminum nitride (AlN) microring resonator by adopting epitaxial material and pedestal structure. With optimized inductively coupled plasma (ICP) dry etching using Cl2/BCl3/Ar mixture, pedestal microring resonators have been fabricated on epitaxial AlN. Transmission measurement reveals a loaded quality factor of ∼1×104 at under-coupled condition, corresponding to a propagation loss of 27 dB/cm around 1.55 μm. Thermal effect induced resonant peak shift at different coupled powers is 6.3 pm/mW, and optical bistability can be observed at an input power above ∼115 mW.

KW - Epitaxial AlN

KW - ICP dry etching

KW - pedestal microring

KW - thermal properties

UR - http://www.scopus.com/inward/record.url?scp=84953924236&partnerID=8YFLogxK

U2 - 10.1109/ICOCN.2015.7203683

DO - 10.1109/ICOCN.2015.7203683

M3 - Conference contribution

AN - SCOPUS:84953924236

T3 - ICOCN 2015 - 14th International Conference on Optical Communications and Networks, Proceedings

BT - ICOCN 2015 - 14th International Conference on Optical Communications and Networks, Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 14th International Conference on Optical Communications and Networks, ICOCN 2015

Y2 - 3 July 2015 through 5 July 2015

ER -

Liu X, Sun C, Xiong B, Hao Z, Han Y, Wang J 等. Improvement of thermal properties in epitaxial aluminum nitride pedestal microring. 在 ICOCN 2015 - 14th International Conference on Optical Communications and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc. 2015. 7203683. (ICOCN 2015 - 14th International Conference on Optical Communications and Networks, Proceedings). doi: 10.1109/ICOCN.2015.7203683

Improvement of thermal properties in epitaxial aluminum nitride pedestal microring

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