摘要
A high-precision method of detecting motion straightness was proposed based on the principle of plane mirror interference after analyzing the motion straightness error of a linear stage. Detection experiments were carried out and the motion straightness errors were separated by the linear regression method. Finally, linear measurement uncertainty of the detection method was estimated. The results showed that this detection method was simple and accurate, and was especially suitable for precision detection of motion straightness error in the small travel movement of ultra-precision machining.
| 源语言 | 英语 |
|---|---|
| 页（从-至） | 466-470 |
| 页数 | 5 |
| 期刊 | Journal of Beijing Institute of Technology (English Edition) |
| 卷 | 24 |
| 期 | 4 |
| DOI | |
| 出版状态 | 已出版 - 1 12月 2015 |