High-precision laser differential confocal measurement method for multi-geometric parameters of inner and outer spherical surfaces of laser fusion capsules

We propose a well-integrated, high-efficiency, high-precision, and non-destructive differential confocal measurement method for the multi-geometric parameters of the inner and outer spherical surfaces of laser fusion capsules. Based on the laser differential confocal measurement system with high tomography fixed-focus ability and high spatial resolution, the proposed method is used to perform the fixed-focus trigger measurement of the outer vertex, the inner vertex, and the spherical center of the capsule. From the rotation measurement around the Y-axis and the transposition measurement around the Z-axis, the inner and outer diameters, the three-dimensional inner and outer profiles, the shell thickness uniformity, and the shell non-concentricity of the capsule are measured with high precision and no damage. To the best of our knowledge, this is the first method to achieve the high-precision measurement for the multi-geometric parameters of the capsule inner and outer spherical surfaces with the same instrument.