TY - JOUR
T1 - High performance 33.7 GHz surface acoustic wave nanotransducers based on AlScN/diamond/Si layered structures
AU - Wang, Lei
AU - Chen, Shuming
AU - Zhang, Jinying
AU - Zhou, Jian
AU - Yang, Chengtao
AU - Chen, Yiqin
AU - Duan, Huigao
N1 - Publisher Copyright:
© 2018 Author(s).
PY - 2018/8/27
Y1 - 2018/8/27
N2 - Surface acoustic wave (SAW) devices are essential devices for communication and sensing, but usually have an operation frequency limit well below 20 GHz due to the constraints of material properties and fabrication capability. By using an AlScN/diamond layered structure with a high electromechanical coupling coefficient K2 and our proposed two-step exposure electron beam lithography (EBL) process for ultra-fine patterns, we have fabricated SAW devices with resonant frequency up to 33.7 GHz in the Ka-band, the highest one ever reported for SAW devices electrically excited by interdigital transducers (IDTs). Combined with finite element analysis, we identified that series resonances are fundamental and high order Rayleigh modes, and K2 are in the range of 1.21%-2.32%, 200% higher compared to those of traditional AlN/diamond-based SAW devices. The high order modes become stronger and dominant, particularly suitable for the development of ultrahigh frequency SAW devices and applications. In addition, the proposed EBL process showed its superb capability to make ultra-fine IDTs down to the nano-scale with excellent smooth edges and uniform patterns, suitable for ultrahigh frequency SAW development.
AB - Surface acoustic wave (SAW) devices are essential devices for communication and sensing, but usually have an operation frequency limit well below 20 GHz due to the constraints of material properties and fabrication capability. By using an AlScN/diamond layered structure with a high electromechanical coupling coefficient K2 and our proposed two-step exposure electron beam lithography (EBL) process for ultra-fine patterns, we have fabricated SAW devices with resonant frequency up to 33.7 GHz in the Ka-band, the highest one ever reported for SAW devices electrically excited by interdigital transducers (IDTs). Combined with finite element analysis, we identified that series resonances are fundamental and high order Rayleigh modes, and K2 are in the range of 1.21%-2.32%, 200% higher compared to those of traditional AlN/diamond-based SAW devices. The high order modes become stronger and dominant, particularly suitable for the development of ultrahigh frequency SAW devices and applications. In addition, the proposed EBL process showed its superb capability to make ultra-fine IDTs down to the nano-scale with excellent smooth edges and uniform patterns, suitable for ultrahigh frequency SAW development.
UR - http://www.scopus.com/inward/record.url?scp=85052661884&partnerID=8YFLogxK
U2 - 10.1063/1.5046113
DO - 10.1063/1.5046113
M3 - Article
AN - SCOPUS:85052661884
SN - 0003-6951
VL - 113
JO - Applied Physics Letters
JF - Applied Physics Letters
IS - 9
M1 - 093503
ER -