TY - GEN
T1 - Framework of MEMS high accelerated stress test
AU - Wang, Zhen
AU - Xu, Lixin
AU - Wang, Zhao
AU - Zhao, Heming
AU - Song, Rongchang
AU - Lou, Wenzhong
PY - 2010
Y1 - 2010
N2 - Given the reliability principles and failure mechanism of MEMS, this paper discussed the accelerated test from three aspects as follows: the connotation of the test including concept and meaning; the scope of application concerned with product levels for applicants in types of stress; test process includes the test objective determination, test stressing selection, the test profile designing, the implementation scheme determining, analysis and improvement measures.
AB - Given the reliability principles and failure mechanism of MEMS, this paper discussed the accelerated test from three aspects as follows: the connotation of the test including concept and meaning; the scope of application concerned with product levels for applicants in types of stress; test process includes the test objective determination, test stressing selection, the test profile designing, the implementation scheme determining, analysis and improvement measures.
KW - HAST
KW - MEMS
KW - Reliability
UR - http://www.scopus.com/inward/record.url?scp=78649283564&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2010.5592211
DO - 10.1109/NEMS.2010.5592211
M3 - Conference contribution
AN - SCOPUS:78649283564
SN - 9781424465439
T3 - 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
SP - 280
EP - 283
BT - 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
T2 - 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Y2 - 20 January 2010 through 23 January 2010
ER -