Finite element analysis of multi-layer MEMS ferroelectric microcoolers

Yonghong Shang*, Yanqiu Li, Qingtao Zhang, Shaobo Liu

*此作品的通讯作者

科研成果: 期刊稿件文章同行评审

摘要

On the basis of experiments, the paper presented a mathematical model for using Finite Element method, as well as investigated the temperature field characteristics under diverse situations. The results indicate, the efficiency of temperature reduction is better when all ceramic slices are working in simultaneous mode vs. in alternative mode. Under simultaneous mode, to enhance the pressure among layers will reduce temperature fluctuation. This is important to further investigations on the mechanisms and operating modes of MEMS microcoolers.

源语言英语
页(从-至)260-262
页数3
期刊Zhongguo Jixie Gongcheng/China Mechanical Engineering
16
SUPPL.
出版状态已出版 - 7月 2005
已对外发布

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