@inproceedings{0912fdc0fa454ba08cc7240bbc439d30,
title = "Fabrication technique of nano-grating using AFM",
abstract = "On the basis of the mechanically scratching using the Atomic Force Microscope, this paper proposes a new method for manufacturing high frequency grating. The grating was fabricated on a polycarbonate compact disc with a silicon AFM tip under the contact mode. The fabrication technique and the optimization of parameters for the technique are discussed in detail. From the experiment, the minimum spacing of the grating can reach 30 nm. The digital nano-moir{\'e} patterns verify that the grating has good potential to be applied to the nano-deformation measurement.",
keywords = "Atomic Force Microscope (AFM), Digital moir{\'e}, Grating fabrication, Nano-grating, Nano-lithography",
author = "Huimin Xie and Zhanwei Liu and Ming Zhang and Wei Zhang and Anand Asundi",
year = "2006",
doi = "10.1117/12.663058",
language = "English",
isbn = "0819462446",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Optical Micro- and Nanometrology in Microsystems Technology",
note = "Optical Micro- and Nanometrology in Microsystems Technology ; Conference date: 05-04-2006 Through 07-04-2006",
}