Enhancement of Ohmic heating by Hall current in magnetized capacitively coupled discharges

Bocong Zheng, Keliang Wang, Timothy Grotjohn, Thomas Schuelke, Qi Hua Fan*

*此作品的通讯作者

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42 引用 (Scopus)

摘要

In low-pressure capacitively coupled discharges, a heating mode transition from a pressure-heating dominated state to an Ohmic-heating dominated state is known by applying a small transverse magnetic field. Here we demonstrate via particle-in-cell simulations and a moment analysis of the Boltzmann equation that the enhancement of Ohmic heating is induced by the Hall current in the E × B direction. As the magnetic field increases, the Ohmic heating in the E × B direction dominates the total electron power absorption. The Ohmic heating induced by the Hall current can be well approximated from the Ohmic heating of unmagnetized capacitively coupled discharges.

源语言英语
文章编号09LT03
期刊Plasma Sources Science and Technology
28
9
DOI
出版状态已出版 - 24 9月 2019
已对外发布

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