摘要
Based on the theory of parallel plate electrostatic field with edge effect, the formulas of the capacitance and the electrostatic force of comb-drive structure are derived, and the electrostatic characteristic of the structure is analyzed, which are compared to the results of a finite element method simulation. When the moving fingers are closed to the fixed fingers, pull-in effect occurs, therefore moving range is analyzed in quantity, and the maximum applied voltage is discussed, to provide a theoretical basis for structural design.
| 源语言 | 英语 |
|---|---|
| 页（从-至） | 1-3 |
| 页数 | 3 |
| 期刊 | Dongbei Daxue Xuebao/Journal of Northeastern University |
| 卷 | 29 |
| 期 | SUPPL. |
| 出版状态 | 已出版 - 6月 2008 |