Effect of Resonance Interference on MEMS Gyroscopes and Filtering Algorithm Elimination

The mechanical structure of MEMS gyroscope is a spring-mass-damper system, which is susceptible to interference near the resonant frequency. This work compared the interference effects of mechanical vibrations and high frequency sound waves on MEMS gyroscopes. Three MEMS gyroscopes ADXRS620 were interfered by vibrations and sound waves near the resonant frequency. The error outputs increased linearly with the increase of interference intensity. The maximum error output could reach 88.95 °/s, which seriously affect the normal operation of the gyroscope. The waveforms of gyroscope outputs under acoustic and vibration interference were almost coincident, which showed the similarity of acoustic and vibration interference. However, to produce the same effect on gyroscopes, the power required of vibration interference was much less than that of acoustic interference. Taking one of the gyroscopes for example, when the SPL of acoustic interference was up to 90 dB, the maximum error was only 3.37 °/s. But when the acceleration amplitude of vibration interference reached 0.050 g, the maximum error was 3.42 °/s. In addition, the effectiveness against vibration interference of the filtering algorithm based on orthogonal demodulation was verified by testing the self-developed gyroscope. Vibration interference could be reduced by 98.88% at most.