Effect of ion bombardment energy on the properties of diamond-like carbon film

Jun Qi; Jian Bin Luo; Jing Wang; Wen Zhi Li; Shi Zhu Wen

Effect of ion bombardment energy on the properties of diamond-like carbon film

Jun Qi^*, Jian Bin Luo, Jing Wang, Wen Zhi Li, Shi Zhu Wen

^*此作品的通讯作者

Tsinghua University

科研成果: 期刊稿件 › 文章 › 同行评审

摘要

Effect of ion bombardment energy on microstructure, surface roughness, elasticity, hardness and friction coefficient of the diamond-like carbon (DLC) films deposited by ion beam assisted deposition (IBAD) has been studied. The DLC films with good mechanical and tribological properties have been obtained. The relationship between microstructure and properties has also been discussed. It has been found and analyzed that there is difference between the value of knoop micro-hardness and nanohardness of the same series of DLC films.

源语言	英语
页（从-至）	3-5+44
期刊	Cailiao Gongcheng/Journal of Materials Engineering
期	2
出版状态	已出版 - 2000
已对外发布	是

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title = "Effect of ion bombardment energy on the properties of diamond-like carbon film",

abstract = "Effect of ion bombardment energy on microstructure, surface roughness, elasticity, hardness and friction coefficient of the diamond-like carbon (DLC) films deposited by ion beam assisted deposition (IBAD) has been studied. The DLC films with good mechanical and tribological properties have been obtained. The relationship between microstructure and properties has also been discussed. It has been found and analyzed that there is difference between the value of knoop micro-hardness and nanohardness of the same series of DLC films.",

keywords = "Diamond-like carbon film, Ion beam assisted deposition (ibad), Nanohardness",

author = "Jun Qi and Luo, {Jian Bin} and Jing Wang and Li, {Wen Zhi} and Wen, {Shi Zhu}",

year = "2000",

language = "English",

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journal = "Cailiao Gongcheng/Journal of Materials Engineering",

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T1 - Effect of ion bombardment energy on the properties of diamond-like carbon film

AU - Qi, Jun

AU - Luo, Jian Bin

AU - Wang, Jing

AU - Li, Wen Zhi

AU - Wen, Shi Zhu

PY - 2000

Y1 - 2000

N2 - Effect of ion bombardment energy on microstructure, surface roughness, elasticity, hardness and friction coefficient of the diamond-like carbon (DLC) films deposited by ion beam assisted deposition (IBAD) has been studied. The DLC films with good mechanical and tribological properties have been obtained. The relationship between microstructure and properties has also been discussed. It has been found and analyzed that there is difference between the value of knoop micro-hardness and nanohardness of the same series of DLC films.

AB - Effect of ion bombardment energy on microstructure, surface roughness, elasticity, hardness and friction coefficient of the diamond-like carbon (DLC) films deposited by ion beam assisted deposition (IBAD) has been studied. The DLC films with good mechanical and tribological properties have been obtained. The relationship between microstructure and properties has also been discussed. It has been found and analyzed that there is difference between the value of knoop micro-hardness and nanohardness of the same series of DLC films.

KW - Diamond-like carbon film

KW - Ion beam assisted deposition (ibad)

KW - Nanohardness

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M3 - Article

AN - SCOPUS:71149087950

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JO - Cailiao Gongcheng/Journal of Materials Engineering

JF - Cailiao Gongcheng/Journal of Materials Engineering

IS - 2

ER -

Effect of ion bombardment energy on the properties of diamond-like carbon film

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