Design of real-time and high-precision photoelectric autocollimator

Siyu Zhou, Jiayin Hou, Shanshan Wang, Qiudong Zhu*

*此作品的通讯作者

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

This paper presents the design of a real-time and high-precision photoelectric autocollimator. Firstly, a far exit pupil distance and no vignetting optical system is proposed. Compared with the conventional optical system of autocollimator, it solves the problem of ray cutting which results in the detection accuracy changed with the distance of target lens. Besiedes, it eliminates the influence of stray light. Then, the design of photoelectric detection system is discussed. It uses the specific multi-frame superposition denoising algorithm based on high speed CMOS camera which solves the conflict of improvement of accuracy and time-consuming of the algorithm. Finally, test results of the instrument are given. The measurement repeatability of the autocollimator can reach up to 0.01″ with the measurement range of 1200″ and the single measurement time is less than 17ms.

源语言英语
主期刊名Optoelectronic Devices and Integration VI
编辑Changyuan Yu, Baojun Li, Xuping Zhang
出版商SPIE
ISBN(电子版)9781510604575
DOI
出版状态已出版 - 2016
活动Optoelectronic Devices and Integration VI - Beijing, 中国
期限: 12 10月 201614 10月 2016

出版系列

姓名Proceedings of SPIE - The International Society for Optical Engineering
10019
ISSN(印刷版)0277-786X
ISSN(电子版)1996-756X

会议

会议Optoelectronic Devices and Integration VI
国家/地区中国
Beijing
时期12/10/1614/10/16

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