Design of novel deformable mirror with large displacement

A stabilized zoom system with deformable mirrors (DMs) was designed for continuous optical zoom. In order to adjust the focal length and expand the field angle, the characteristic surface shapes of the DMs composed of the low-order and high-order Zernike polynomials were provided. The maximum peak-to-valley (PV) value at the center of the surface shape is 80 μm. This work presents a piezoelectrically-actuated deformable mirror (PADM) with large displacement for a stabilized zoom system. The COMSOL simulation was conducted to obtain the desired design by matching and optimizing structural parameters. The maximum displacement of PADM was more than 80 μm. The fitting results by the steepest descent algorithm (SD) showed that the RMS values of the residual surface shapes were 1 of 7 to 1 of 4 of their PV values, and the PV values of the residual surface shapes were less than 1 of 10 of the PV values of the target surface shapes.