TY - GEN
T1 - Design of High Sensitivity Interdigital Capactive Humidity Sensor Based on Uncertainty Analysis
AU - Li, Dapeng
AU - Chen, Aobei
AU - Hu, Chun
AU - Na, Rui
AU - Miao, Yihan
AU - Zheng, Dezhi
N1 - Publisher Copyright:
© 2022 ACM.
PY - 2022/9/11
Y1 - 2022/9/11
N2 - Humidity sensors have been widely used in various fields of life, among which sensitivity is one of the most important indicators for its evaluation. Quantitatively analyzing the effect of structural errors on sensitivity is a big challenge in sensor design. To address this problem, this paper proposes a structural uncertainty analysis method. By establishing the mathematical model and uncertainty propagation model, the influence of the interdigital capacitive humidity sensor's structural uncertainty on the sensitivity is quantitatively analyzed. The accuracy and superiority of the proposed method are also verified by finite element simulation.
AB - Humidity sensors have been widely used in various fields of life, among which sensitivity is one of the most important indicators for its evaluation. Quantitatively analyzing the effect of structural errors on sensitivity is a big challenge in sensor design. To address this problem, this paper proposes a structural uncertainty analysis method. By establishing the mathematical model and uncertainty propagation model, the influence of the interdigital capacitive humidity sensor's structural uncertainty on the sensitivity is quantitatively analyzed. The accuracy and superiority of the proposed method are also verified by finite element simulation.
KW - finite element simulation
KW - high sensitivity
KW - humidity sensor
KW - uncertainty analysis
UR - http://www.scopus.com/inward/record.url?scp=85159029614&partnerID=8YFLogxK
U2 - 10.1145/3544793.3560407
DO - 10.1145/3544793.3560407
M3 - Conference contribution
AN - SCOPUS:85159029614
T3 - UbiComp/ISWC 2022 Adjunct - Proceedings of the 2022 ACM International Joint Conference on Pervasive and Ubiquitous Computing and Proceedings of the 2022 ACM International Symposium on Wearable Computers
SP - 415
EP - 420
BT - UbiComp/ISWC 2022 Adjunct - Proceedings of the 2022 ACM International Joint Conference on Pervasive and Ubiquitous Computing and Proceedings of the 2022 ACM International Symposium on Wearable Computers
PB - Association for Computing Machinery, Inc
T2 - 2022 ACM International Joint Conference on Pervasive and Ubiquitous Computing and the 2022 ACM International Symposium on Wearable Computers, UbiComp/ISWC 2022
Y2 - 11 September 2022 through 15 September 2022
ER -