Design and implementation of optical micro-scanning thermal microscope imaging system with high resolution

To improve the spatial resolution of the developed thermal microscope based on the uncooled focal plane arrays, a novel high resolution thermal microscope imaging system with optical plate rotating micro-scanner is designed. The working principle of the optical plate rotating micro-scanner is analyzed. Moreover, the parameter design, the error analysis, the process tolerance, the technical parameters and the composition of the whole system are all given. The results of standard oversample reconstruction for real thermal microscope images show that the design of system is successful and achieves higher resolution. The system can be applied into many systems which need high spatial resolution.