@inproceedings{2825a1e797c34e229b95898970ec5bf1,
title = "Design and Fabrication of a Piezoelectric Micromachined Ultrasonic Transducer Array Based on Ceramic PZT",
abstract = "This paper presents a piezoelectric micromachined ultrasonic transducer (pMUT) array fabricated using high-piezoelectric-coefficient ceramic PZT wafers. A new process for polishing ceramic PZT layers down to 5 μm has been developed and applied for manufacturing high-sensitivity pMUTs. A 2 MHz working pMUT array (8× 8 elements) based on ceramic PZT has been designed, modeled, fabricated and characterized.",
keywords = "ceramic PZT, micromachined transducers, pMUT, piezoelectric, ultrasonic transducers",
author = "Haoran Wang and Yuanyuan Yu and Zhenfang Chen and Hao Yang and Huabei Jiang and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 17th IEEE SENSORS Conference, SENSORS 2018 ; Conference date: 28-10-2018 Through 31-10-2018",
year = "2018",
month = dec,
day = "26",
doi = "10.1109/ICSENS.2018.8589693",
language = "English",
series = "Proceedings of IEEE Sensors",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2018 IEEE SENSORS, SENSORS 2018 - Conference Proceedings",
address = "United States",
}