摘要
Creep behavior and fatigue life are important performance indexes that affect the long-term stability of resistive strain gauges. The resistive strain gauges, fabricated with wet etching and resistance trimming, present micro-morphology such as textures and uneven edges on the surface and side-wall profile of sensitive grids. This paper observed the micro-morphology of the sensitive grids by microscope and analyzed its range of geometric dimensions. A sine function was used to establish equivalent geometric models for the surface textures and side-wall profile. Based on time hardening theory and the S–N curve, the dependence of micro-morphology of metal resistive strain gauges on creep behavior and fatigue life was studied. The results indicate that the roughness of micro-morphology has an influence on creep behavior and fatigue life. The surface textures and side-wall profile lead to the increase of creep strain and the decrease of fatigue life in varying degrees. When 60% of the ultimate stress of the strain gauges is loaded, the average creep strain in steady-state calculated by the maximum roughness of the side-wall profile reaches up to 6.95 times that of the perfect flat surface. Under the condition of loading 70% of the ultimate stress and the same roughness, the fatigue life led by side-wall profile could be reduced to 1/25 of the textured surface. The obtained achievements promote an understanding for optimizing the fabrication process of resistive strain gauges as well as developing high-precision and long-life force sensors.
源语言 | 英语 |
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文章编号 | 379 |
期刊 | Micromachines |
卷 | 13 |
期 | 3 |
DOI | |
出版状态 | 已出版 - 3月 2022 |