Computer simulation of phase-shift algorithm

When applying phase-stepping interferometry to measure wavefront with aberration, distortion is caused by various factors and the main one is phase-shifting error from phase shifter. In this paper, the calculation theory and consequence in measurement error of the phase shift algorithm are discussed. These algorithms include traditional three-phase algorithm, traditional four-phase algorithm, traditional five-phase algorithm, carre algorithm, new compensating four-phase algorithm and new compensating five-phase algorithm. According to the theory analysis and computer stimulation, these methods are compared through introduce phase-shifting error, wavefront aberration and Gauss noise, the results show the new compensating five-phase algorithm is immune to phase-shifting error, and its result is insensitive to Gauss noise, it can improve measurement accuracy effectively.