Computer-aided alignment method based on deep learning

Wenxi Wang, Yifan Huang, Dongmei Li, Jiajing Cao, Xiaoxiao Lai, Jun Chang*

*此作品的通讯作者

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

The optical system will always be different from the design value after been processed. It is necessary to adjust the relative positions between the optical elements to improve the imaging quality of the system. However, if the elements are adjusted randomly, the alignment will be inefficient, so the computer-aided alignment method came into being. In this article, for the alignment of large aberration systems, a new fully-connected network computer-aided alignment (Fc-Net CAA) method is proposed. The systems’ wavefront errors (WFEs) are described by the Zernike polynomials which have a huge advantage in describing system aberrations and we proposed a Fc-Net model for predicting systems’ misalignment. The Fc-Net model is trained with the WFEs of thousands of randomly misaligned instances of the lens system that are modeled in the optical design software, so as to establish the relationship between the system aberrations and the amount of misalignment. In this way, the proposed Fc-Net CAA can achieve the computer-aided adjustment process for systems with large aberrations without a complicated iterative process. The off-axis three-mirror system with aspheric surfaces was simulated and adjusted. During the simulation, a single round of adjustment can make the optical system close to the design wave aberration values, and the average of the five field-of-view WFEs is enhanced from 2.4λ (RMS; λ=550nm) to 0.0764 λ (average). The simulation results verify that the improved algorithm can solve the large initial alignment error of the off-axis reflective optical system with aspheric surfaces.

源语言英语
主期刊名AOPC 2022
主期刊副标题Novel Optical Design; and Optics Ultra Precision Manufacturing and Testing
编辑Lingbao Kong, Dawei Zhang, Zexin Feng
出版商SPIE
ISBN(电子版)9781510662322
DOI
出版状态已出版 - 2023
活动2022 Applied Optics and Photonics China: Novel Optical Design; and Optics Ultra Precision Manufacturing and Testing, AOPC 2022 - Virtual, Online, 中国
期限: 18 12月 202219 12月 2022

出版系列

姓名Proceedings of SPIE - The International Society for Optical Engineering
12559
ISSN(印刷版)0277-786X
ISSN(电子版)1996-756X

会议

会议2022 Applied Optics and Photonics China: Novel Optical Design; and Optics Ultra Precision Manufacturing and Testing, AOPC 2022
国家/地区中国
Virtual, Online
时期18/12/2219/12/22

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