Comparison of Ozone Production in Planar DBD of Different Modes

Ozone production in a planar dielectric barrier discharge (DBD) in atmospheric oxygen in different discharge modes was investigated. Results show that the gas temperature in discharge channel depends strongly on discharge mode, with a value of 300–310 K in glow regime and 440–465 K in streamer regime. Ozone production yield in glow DBD is much higher than that in streamer one, with the best yield of 342.6 and 162.6 g/kWh, respectively. Gas temperature in discharge channel relates to the effective discharge area of DBD, which is a small fraction of the whole electrode surface in streamer DBD compared with nearly the whole surface in glow DBD. The gas temperature in the channel plays a decisive role in the conversion of oxygen atoms to ozone as well as the ozone equilibrium concentration. Excellent performance of glow DBD demonstrates the high energy efficiency and reliability for practical application of planar DBD-based ozone generator.