Chemical vapour deposition phase diagrams for zirconium carbide

Jinling Liu*, Yongdong Xu, Laifei Cheng, Litong Zhang, Yiguang Wang

*此作品的通讯作者

科研成果: 书/报告/会议事项章节会议稿件同行评审

3 引用 (Scopus)

摘要

Thermodynamic equilibrium condensed phases for chemical vapor deposition (CVD) of zirconium carbide (ZrC) from C3H6-ZrCl 4-H2 and CH4-ZrCl4-H2 were calculated by a method based on the minimization of the free energy of the reaction system. The deposition phase diagrams, which indicated the condensed phases, were then constructed from the calculation results. These diagrams demonstrated the effect of partial pressure of reactants, deposition temperatures, and the different carbon sources on the final condensed phases. Useful information can be provided from these diagrams to determine the process parameters for the deposition of ZrC coatings.

源语言英语
主期刊名Advanced Design and Manufacture to Gain a Competitive Edge
主期刊副标题New Manufacturing Techniques and their Role in Improving Enterprise Performance
出版商CSREA Press
209-214
页数6
ISBN(印刷版)9781848002401
DOI
出版状态已出版 - 2008
已对外发布
活动Advanced Design and Manufacture to Gain a Competitive Edge: New Manufacturing Techniques and their Role in Improving Enterprise Performance - Sanya, Hainan, 中国
期限: 14 1月 200816 1月 2008

出版系列

姓名Advanced Design and Manufacture to Gain a Competitive Edge: New Manufacturing Techniques and their Role in Improving Enterprise Performance

会议

会议Advanced Design and Manufacture to Gain a Competitive Edge: New Manufacturing Techniques and their Role in Improving Enterprise Performance
国家/地区中国
Sanya, Hainan
时期14/01/0816/01/08

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