Bulk modulus measurement of microfluidics by longitudinal bulk acoustic wave sensors

Yao Lu; Hongxiang Zhang; Yuan Jiang; Hao Zhang; Wei Pang; Menglun Zhang

doi:10.1109/MEMSYS.2018.8346690

Bulk modulus measurement of microfluidics by longitudinal bulk acoustic wave sensors

Yao Lu, Hongxiang Zhang, Yuan Jiang, Hao Zhang, Wei Pang^*, Menglun Zhang

^*此作品的通讯作者

State Key Laboratory of Precision Measuring Technology and Instruments

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

2 引用（Scopus）

摘要

In this paper, we measured bulk modulus of microfluidics using bulk acoustic wave (BAW) MEMS sensors. The 2.5 GHz resonant sensor interacted with fluids by longitudinal bulk acoustic waves. Measurement experiments were carried out on 1 pL glycerol-water sample droplets, and the results were compared with theoretical models. We showed that the longitudinal acoustic wave sensors are sensitive to bulk modulus of microfluidics (sensitivity of 12.42 MHzm²N^-1). We also validated that the sensors are insensitive to viscosity, which is another important liquid property usually measured by shear acoustic wave sensors.

源语言	英语
主期刊名	2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
出版商	Institute of Electrical and Electronics Engineers Inc.
页	854-857
页数	4
ISBN（电子版）	9781538647820
DOI	https://doi.org/10.1109/MEMSYS.2018.8346690
出版状态	已出版 - 24 4月 2018
已对外发布	是
活动	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, 英国期限: 21 1月 2018 → 25 1月 2018

出版系列

姓名	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
卷	2018-January
ISSN（印刷版）	1084-6999

会议

会议	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
国家/地区	英国
市	Belfast
时期	21/01/18 → 25/01/18

访问文件

10.1109/MEMSYS.2018.8346690

其它文件与链接

链接到 Scopus 的出版物

引用此

Lu, Y., Zhang, H., Jiang, Y., Zhang, H., Pang, W., & Zhang, M. (2018). Bulk modulus measurement of microfluidics by longitudinal bulk acoustic wave sensors. 在 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018 (页码 854-857). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); 卷 2018-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2018.8346690

@inproceedings{afb7aa7a8b334a36b7b57169be9c7f38,

title = "Bulk modulus measurement of microfluidics by longitudinal bulk acoustic wave sensors",

abstract = "In this paper, we measured bulk modulus of microfluidics using bulk acoustic wave (BAW) MEMS sensors. The 2.5 GHz resonant sensor interacted with fluids by longitudinal bulk acoustic waves. Measurement experiments were carried out on 1 pL glycerol-water sample droplets, and the results were compared with theoretical models. We showed that the longitudinal acoustic wave sensors are sensitive to bulk modulus of microfluidics (sensitivity of 12.42 MHzm2N-1). We also validated that the sensors are insensitive to viscosity, which is another important liquid property usually measured by shear acoustic wave sensors.",

author = "Yao Lu and Hongxiang Zhang and Yuan Jiang and Hao Zhang and Wei Pang and Menglun Zhang",

note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 ; Conference date: 21-01-2018 Through 25-01-2018",

year = "2018",

month = apr,

day = "24",

doi = "10.1109/MEMSYS.2018.8346690",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "854--857",

booktitle = "2018 IEEE Micro Electro Mechanical Systems, MEMS 2018",

address = "United States",

}

Lu, Y, Zhang, H, Jiang, Y, Zhang, H, Pang, W & Zhang, M 2018, Bulk modulus measurement of microfluidics by longitudinal bulk acoustic wave sensors. 在 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 卷 2018-January, Institute of Electrical and Electronics Engineers Inc., 页码 854-857, 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, 英国, 21/01/18. https://doi.org/10.1109/MEMSYS.2018.8346690

Bulk modulus measurement of microfluidics by longitudinal bulk acoustic wave sensors. / Lu, Yao; Zhang, Hongxiang; Jiang, Yuan 等.
2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. 页码 854-857 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); 卷 2018-January).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - Bulk modulus measurement of microfluidics by longitudinal bulk acoustic wave sensors

AU - Lu, Yao

AU - Zhang, Hongxiang

AU - Jiang, Yuan

AU - Zhang, Hao

AU - Pang, Wei

AU - Zhang, Menglun

PY - 2018/4/24

Y1 - 2018/4/24

N2 - In this paper, we measured bulk modulus of microfluidics using bulk acoustic wave (BAW) MEMS sensors. The 2.5 GHz resonant sensor interacted with fluids by longitudinal bulk acoustic waves. Measurement experiments were carried out on 1 pL glycerol-water sample droplets, and the results were compared with theoretical models. We showed that the longitudinal acoustic wave sensors are sensitive to bulk modulus of microfluidics (sensitivity of 12.42 MHzm2N-1). We also validated that the sensors are insensitive to viscosity, which is another important liquid property usually measured by shear acoustic wave sensors.

AB - In this paper, we measured bulk modulus of microfluidics using bulk acoustic wave (BAW) MEMS sensors. The 2.5 GHz resonant sensor interacted with fluids by longitudinal bulk acoustic waves. Measurement experiments were carried out on 1 pL glycerol-water sample droplets, and the results were compared with theoretical models. We showed that the longitudinal acoustic wave sensors are sensitive to bulk modulus of microfluidics (sensitivity of 12.42 MHzm2N-1). We also validated that the sensors are insensitive to viscosity, which is another important liquid property usually measured by shear acoustic wave sensors.

UR - http://www.scopus.com/inward/record.url?scp=85047016315&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2018.8346690

DO - 10.1109/MEMSYS.2018.8346690

M3 - Conference contribution

AN - SCOPUS:85047016315

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 854

EP - 857

BT - 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018

Y2 - 21 January 2018 through 25 January 2018

ER -

Lu Y, Zhang H, Jiang Y, Zhang H, Pang W, Zhang M. Bulk modulus measurement of microfluidics by longitudinal bulk acoustic wave sensors. 在 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc. 2018. 页码 854-857. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2018.8346690

Bulk modulus measurement of microfluidics by longitudinal bulk acoustic wave sensors

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