Brightness checkerboard lattice method for the calibration of the coaxial reverse Hartmann test

Xinji Li, Mei Hui*, Ning Li, Shinan Hu, Ming Liu, Lingqin Kong, Liquan Dong, Yuejin Zhao

*此作品的通讯作者

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

The coaxial reverse Hartmann test (RHT) is widely used in the measurement of large aspheric surfaces as an auxiliary method for interference measurement, because of its large dynamic range, highly flexible test with low frequency of surface errors, and low cost. And the accuracy of the coaxial RHT depends on the calibration. However, the calibration process remains inefficient, and the signal-to-noise ratio limits the accuracy of the calibration. In this paper, brightness checkerboard lattices were used to replace the traditional dot matrix. The brightness checkerboard method can reduce the number of dot matrix projections in the calibration process, thus improving efficiency. An LCD screen displayed a brightness checkerboard lattice, in which the brighter checkerboard and the darker checkerboard alternately arranged. Based on the image on the detector, the relationship between the rays at certain angles and the photosensitive positions of the detector coordinates can be obtained. And a differential de-noising method can effectively reduce the impact of noise on the measurement results. Simulation and experimentation proved the feasibility of the method. Theoretical analysis and experimental results show that the efficiency of the brightness checkerboard lattices is about four times that of the traditional dot matrix, and the signal-to-noise ratio of the calibration is significantly improved.

源语言英语
主期刊名2017 International Conference on Optical Instruments and Technology
主期刊副标题Optoelectronic Measurement Technology and Systems
编辑Kexin Xu, Hai Xiao, Jigui Zhu, Hwa-Yaw Tam
出版商SPIE
ISBN(电子版)9781510617537
DOI
出版状态已出版 - 2018
活动2017 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems - Beijing, 中国
期限: 28 10月 201730 10月 2017

出版系列

姓名Proceedings of SPIE - The International Society for Optical Engineering
10621
ISSN(印刷版)0277-786X
ISSN(电子版)1996-756X

会议

会议2017 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems
国家/地区中国
Beijing
时期28/10/1730/10/17

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引用此

Li, X., Hui, M., Li, N., Hu, S., Liu, M., Kong, L., Dong, L., & Zhao, Y. (2018). Brightness checkerboard lattice method for the calibration of the coaxial reverse Hartmann test. 在 K. Xu, H. Xiao, J. Zhu, & H.-Y. Tam (编辑), 2017 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems 文章 1062104 (Proceedings of SPIE - The International Society for Optical Engineering; 卷 10621). SPIE. https://doi.org/10.1117/12.2288068