ANSYS simulation of the capacitance coupling of quartz tuning fork gyroscope

Qing Zhang, Lihui Feng*, Ke Zhao, Fang Cui, Yu Nan Sun

*此作品的通讯作者

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

Coupling error is one of the main error sources of the quartz tuning fork gyroscope. The mechanism of capacitance coupling error is analyzed in this article. Finite Element Method (FEM) is used to simulate the structure of the quartz tuning fork by ANSYS software. The voltage output induced by the capacitance coupling is simulated with the harmonic analysis and characteristics of electrical and mechanical parameters influenced by the capacitance coupling between drive electrodes and sense electrodes are discussed with the transient analysis.

源语言英语
主期刊名2013 International Conference on Optical Instruments and Technology
主期刊副标题Optical Sensors and Applications
出版商SPIE
ISBN(印刷版)9780819499622
DOI
出版状态已出版 - 2013
活动2013 International Conference on Optical Instruments and Technology: Optical Sensors and Applications - Beijing, 中国
期限: 17 11月 201319 11月 2013

出版系列

姓名Proceedings of SPIE - The International Society for Optical Engineering
9044
ISSN(印刷版)0277-786X
ISSN(电子版)1996-756X

会议

会议2013 International Conference on Optical Instruments and Technology: Optical Sensors and Applications
国家/地区中国
Beijing
时期17/11/1319/11/13

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