Analysis of Parameters of an RF Inductively Coupled Plasma Torch and Dispersed Flow of Vaporized Quartz Particles

Abstract: Heating and vaporization of quartz particles in argon-plasma flow of an RF inductively coupled plasma torch is numerically simulated using a model of two-phase collisionless monodispersed mixture. Conditions for flow regimes with the ring-type frontal vortex and complete or partial penetration of particles to the high-temperature region of discharge are determined. Dependences of the degree of vaporization and specific vaporization energy on the main working parameters of RF-ICP torch and dispersed particle flow (primarily, feed rate of quartz particles, coupled power, and size and injection angle of particles in the plasma flow) are determined. Recommendations on the optimal parameters of the inductively coupled plasma torch quartz particle flow are presented.