Analysis of curvature signal of wavefront curvature sensing by comparison for uniform wave and Gaussian wave

Wavefront curvature sensor has been used in the field of adaptive optics and optical metrology. But the application is generally based on the assumption that the intensity and wavefront of the incident light is uniform distributed, which is disaccord to the basic principle of curvature sensing technology. The theoretical analytic expression of wavefront curvature signal got from sensors for the non-uniform incident light is work out with the mean according to Fourier optics theory. The numerical analysis of curvature signal deviation for uniform wave and Gaussian wave has been done using the signal expression under uniform and non-uniform intensity. The result of analysis indicates that the deviation of wavefront curvature sensor sign appears under uniform wave and Gaussian wave. When the phase distribution is 4^th Zernike polynomials, the deviation is the most. The deviation reduces as the order of Zernike polynomials increases.