摘要
Air damping force of importance, origin and effective range of action in micro-electro-mechanical systems (MEMS) were investigated. To identify the relative importance of air damping forces in MEMS, a comparison of two major operating forces is made quantitatively with respect to their interaction range, and its results are discussed. The results show that because of extremely small sizes of micromechanical structures in MEMS, air damping force becomes significant to influence behaviors of micro-electro-mechanical devices. The air damping force' equation will be a useful tool of design for damping structures in MEMS. In order to effectively reduce the gas damping and release the gas, the recommendations in MEMS design is that processing holes in the large plate.
| 源语言 | 英语 |
|---|---|
| 页（从-至） | 4-6 |
| 页数 | 3 |
| 期刊 | Dongbei Daxue Xuebao/Journal of Northeastern University |
| 卷 | 29 |
| 期 | SUPPL. |
| 出版状态 | 已出版 - 6月 2008 |