An experimental study on digital nano-moire method

Zhan Wei Liu*, Hui Min Xie, Dai Ning Fang, Fu Long Dai, Hai Ming Guo, Hong Liu, Hong Jun Gao, Qi Kun Xue

*此作品的通讯作者

科研成果: 期刊稿件文章同行评审

摘要

A digital nano-moire method for measuring nanometer-deformation is proposed. In measurement, periodic crystal lattices of crystal materials and atoms structure of the reconstructed surface of some PCC transition and noble metals are acted as specimen gratings, whose pitches are up to nanometer and sub-nanometer. Sine digital grating (computer generated grating) is acted as reference grating. The formation mechanism of digital nano-moire fringe and the design project of sine digital grating are discussed. In addition, the displacement and strain measurement principle, phase shifting technique and multiplication method of fringe are presented.

源语言英语
页(从-至)9-12
页数4
期刊Guangxue Jishu/Optical Technique
30
1
出版状态已出版 - 1月 2004
已对外发布

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