An Electrothermal Micromirror with J-shaped Bimorph Microactuators

Liang Zhou, Dingkang Wang, Huikai Xie*

*此作品的通讯作者

科研成果: 书/报告/会议事项章节会议稿件同行评审

2 引用 (Scopus)

摘要

A tip-Tilt-piston micromirror with four J-shaped bimorph microactuators is developed to increase robustness and stability. The diameter of the central mirror plate is 1 mm and the footprint of the entire device is only 1.6 × 1.6 mm2. The micromirror scans 3° (optical) at 2.8 Vdc. The piston mode and rotation mode are measured at 880 Hz and 1555 Hz, respectively.

源语言英语
主期刊名OMN 2019 - 2019 International Conference on Optical MEMS and Nanophotonics, Proceedings
出版商IEEE Computer Society
226-227
页数2
ISBN(电子版)9781728145013
DOI
出版状态已出版 - 7月 2019
已对外发布
活动2019 International Conference on Optical MEMS and Nanophotonics, OMN 2019 - Daejeon, 韩国
期限: 28 7月 20191 8月 2019

出版系列

姓名International Conference on Optical MEMS and Nanophotonics
2019-July
ISSN(印刷版)2160-5033
ISSN(电子版)2160-5041

会议

会议2019 International Conference on Optical MEMS and Nanophotonics, OMN 2019
国家/地区韩国
Daejeon
时期28/07/191/08/19

指纹

探究 'An Electrothermal Micromirror with J-shaped Bimorph Microactuators' 的科研主题。它们共同构成独一无二的指纹。

引用此