An All-Sapphire Fiber Diaphragm-Free Extrinsic Fabry-Perot Interferometric Sensor for the Measurement of Gas Pressure at Ultrahigh Temperature

An all-sapphire fiber extrinsic Fabry-Perot interferometer (EFPI) sensor for the measurement of gas pressure at ultrahigh temperature is proposed and experimentally demonstrated. The sensor head is composed of two segments of sapphire fiber and a sapphire capillary. By using the femtosecond (fs) laser micromachining, a through hole is inscribed in the sapphire capillary wall to allow the gas flow. This EFPI is used to measure the pressure in the temperature range of 25 °C-1400 °C by monitoring the optical cavity length (OCL) of the interferometer. Experiment results show that the sensor exhibits a good linearity within a pressure range from 0 to 5 MPa at a fixed temperature. The pressure sensitivity of the sensor decreases as the temperature increases, and sensitivities are 1.018 and 0.188 μm /MPa at 25 °C and 1400 °C, respectively. The proposed all-sapphire fiber pressure sensor has the properties of high-temperature resistance, intrinsic safety, small volume, and large measuring range, which can be used in high-temperature and harsh environments.